Growth of hard amorphous TiAlSiN thin films by cathodic arc evaporation
نویسندگان
چکیده
منابع مشابه
Properties of nitrogen doped tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique
The properties of nitrogen doped tetrahedral amorphous carbon films prepared by the filtered cathodic vacuum arc technique have been studied. The doping species, nitrogen ions, were produced by an ion beam source. The nitrogen flow rate was varied from 0.5 to 10 sccm while keeping other deposition conditions constant. The nitrogen content in deposited films was determined by Rutherford backscat...
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Nitrogen-doped tetrahedral amorphous carbon (ta-C :N) films were deposited by filtered cathodic vacuum arc (FCVA) technique using nitrogen as a background gas. The structure of the ta-C :N films was studied with X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy in terms of nitrogen flow rate used during the film deposition. Potential windows of the films measured in deaerated and un...
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Tetrahedral amorphous carbon (ta-C ) is a potential low-cost substitute for diamond in certain applications, but little is known of the temperature range over which its desirable properties are retained. The thermal stability of tetrahedral amorphous carbon (ta-C ) films has been investigated by heat treatment of the films at temperatures from room temperature to 450°C in high vacuum, low vacuu...
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Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been examined by ultraviolet (UV) at 325 nm and visible Raman spectroscopy at 457 nm excitation wavelength. The comprehensive study of behaviour of G, D and T band with sp/sp content has been carried out. The upwards shift of the G peak with sp content was observed for both...
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In the present study, CrN, TiN and (Ti, Cr)N coatings were deposited on D6 tool steel substrates. Physical and mechanical properties of coatings such as microstructure, thickness, phase composition, and hardness were evaluated. Phase compositions were studies by X-ray diffraction method. Mechanical properties were determined by nano-indentation technique. The friction and wear behaviour of the ...
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2013
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2013.07.014